PuroMaxx Contamination Control
Â鶹Éç offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes.
Â鶹Éç offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers.
- PuroMaxxâ„¢ FOUP/Pod Cleaners
- PuroMaxxâ„¢ EUV Pod Cleaner
- GuardianProâ„¢ Reticle Storage
- PuroMaxxâ„¢ 2 Reticle Changers